Microwave Plasma synthesis of nanopowders

Chau Lik Hang Joseph
Industrial Technology Research Institute

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     Last modified: February 16, 2006

Abstract
Microwave Plasma Synthesis of Nanopowders

Joseph Lik Hang Chau
Ultrafine Powders Laboratory,
Industrial Technology Research Institute, Hsinchu, Taiwan


Abstract

Nanopowders were synthesized by using microwave plasma synthesis technique. The microwave plasma was operated in atmospheric pressure at a frequency of 2.45 GHz. The precursor material (liquid or powder) was put into the feed dosing device. The feeding rate of the precursor materials can be well controlled by the up-moving rate of the piston in the feeding device. Cooling gas was used to quench the as-synthesized particles in order to inhibit further particle growth and minimize coagulation. The precursor is decomposed thermally in the plasma reaction region and the products will then condensed in the heat exchanger which separate from the gas by the powder filter, and then finally collected in the powder collector. The effect of various processing parameters such as the effect of plasma gas and feeding rate was systematically studied in this work. Metal, metal oxides and metal nitrides nanopowders were successfully synthesized by using the microwave plasma synthesis method. This method is direct, convenient and simple without the need of further purification of the product powders.